Freestanding membranes of cross-linked gold nanoparticles:novel functional materials for electrostatic actuators

Link:
Autor/in:
Erscheinungsjahr:
2015
Medientyp:
Text
Schlagworte:
  • MEMS
  • NEMS
  • actuator
  • electrostatic
  • freestanding
  • gold
  • membrane
  • nanoparticle
Beschreibung:
  • Their tunable electrical, optical, and mechanical properties make freestanding membranes of organically cross-linked gold nanoparticles (GNPs) interesting materials for applications in micro- and nanoelectromechanical systems. Here, we demonstrate the application of α,ω-alkanedithiol-cross-linked GNP membranes as electrostatically driven actuators. The devices were fabricated by depositing these membranes (thickness 29-45 nm) onto cylindrical cavities (diameter ∼200 μm; depth ∼8-15 μm), which were lithographically patterned in a SU-8 resist. Applying voltages of up to ±40 V across the membrane and the silicon substrate deflected the membranes by several hundreds of nanometers, as measured by atomic force microscopy, confocal microscopy, and interferometry. A simple electrostatic model, which takes into account the membranes mechanical properties, was used to interpret the experimental data.
Lizenz:
  • info:eu-repo/semantics/closedAccess
Quellsystem:
Forschungsinformationssystem der UHH

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oai:www.edit.fis.uni-hamburg.de:publications/846dca68-e778-4e3e-9c55-c7cf89c8222d