Growth stages of YSZ-buffer layers and YBa2Cu3O7-x thin films on silicon substrates studied by scanning probe microscopy

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Erscheinungsjahr:
1994
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Text
Schlagwort:
  • 68.55
Beschreibung:
  • Scanning probe microscopy has been applied to study various growth stages of YSZ (yttria-stabilized zirconia) buffer layers on silicon and of YBa2Cu3O7-x thin films on YSZ/Si. YSZ buffer layers of 75 nm thickness exhibit a remarkable smooth surface with a rms roughness of about 0.5 nm for a surface area of 5 μm×5 μm. The subsequent growth of YBa2Cu3O7-x thin films was investigated from nucleation to the formation of growth hills. Screw dislocations were found only in very rare cases. © 1994 Springer-Verlag.
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  • info:eu-repo/semantics/closedAccess
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Forschungsinformationssystem der UHH
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oai:www.edit.fis.uni-hamburg.de:publications/c74e0f43-7665-4efb-bad0-793d01cfde04