The findability (F), accessibility (A), interoperability (I), and re-usability (R) of research data are essential and acknowledged factors for an efficient re-use of data, e.g. for data driven science. However, in the field of plasma technology there is currently a lack of common standards and tools to publish data according to these FAIR data principles. To address this issue, the present contribution reports on the development of a modular metadata model for the representation of subject- and method-specific metadata in the field of plasma technology, which is based on the core plasma metadata schema, Plasma-MDS (https://arxiv.org/abs/1907.07744). The linking and semantic description of the metadata modules are carried out via ontologies. The developed tools and services are made available via a plasma technology knowledge graph and the data platform https://www.inptdat.de/. They are intended to be reviewed and further developed by the low-temperature plasma community to provide a common basis for open science and research data management according to the FAIR principles.