Hydrogenated amorphous silicon photonic device trimming by UV-irradiation

Link:

https://hdl.handle.net/11420/9945

Autor/in:

Verlag/Körperschaft:

Hamburg University of Technology

Erscheinungsjahr:

2014

Medientyp:

Text

Schlagwort:

530: Physik

Beschreibung:

A method to compensate for fabrication tolerances and to fine-tune individual photonic circuit components is inevitable for waferscale photonic systems even with most-advanced CMOS-fabrication tools. We report a cost-effective and highly accurate method for the permanent trimming of hydrogenated amorphous silicon photonic devices by UV-irradiation. Microring resonators and Mach-Zehnder-interferometers were utilized as photonic test devices. The MZIs were tuned forth and back over their complete free spectral range of 5.5 nm by locally trimming the two MZI-arms. The trimming range exceeds 8 nm for compact ring resonators with trimming accuracies of 20pm. Trimming speeds of ≥ 10 GHz/s were achieved. The components did not show any substantial device degradation. © 2014 Optical Society of America.

Beziehungen:

DOI 10.1364/OE.22.012122

Quellsystem:

TUHH Open Research

Interne Metadaten

Quelldatensatz: oai:tore.tuhh.de:11420/9945