On-chip sensing with high-Q amorphous silicon microdisk resonators

Link:
Autor/in:
Verlag/Körperschaft:
Hamburg University of Technology
Erscheinungsjahr:
2013
Medientyp:
Text
Schlagworte:
  • hydrogenated amorphous silicon
  • Integrated optics
  • photonic microdisk
  • refractive index sensor
  • silicon photonics
  • 530: Physik
Beschreibung:
  • In this paper we present a low-loss hydrogenated amorphous silicon microdisk resonator which is employed for evanescent field refractive index sensing. The resonances of the whispering gallery modes have extinction ratios of <25dB and Q-factors up to 15000 when covered with aqueous solutions. The sensitivity of the microdisk sensor was experimentally determined to be 460nm/RIU for the qTM-mode with different concentrations of NaCl dispersed in deionized water. From the measurements the resonators intrinsic limit of detection was calculated to be LOD=3.3x10-4 and the minimum detectable amount of NaCl diluted in DI-water was determined to be 0.0375%. The early results prove that photonic microdisk resonators that are fabricated with low-loss hydrogenated amorphous silicon material can be applied in a variety of different areas for label-free lab-on-chip sensing, including chemical, medical and bio-sensing applications. © 2013 SPIE.
Beziehungen:
DOI 10.1117/12.2019502
Quellsystem:
TUHH Open Research
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