On the Multipole Resonance Probe : Current Status of Research and Development

Link:
Autor/in:
Verlag/Körperschaft:
IEEE
Erscheinungsjahr:
2021
Medientyp:
Text
Schlagworte:
  • Active plasma resonance spectroscopy (APRS)
  • Electrodes
  • Materials requirements planning
  • multipole resonance probe (MRP)
  • plasma control
  • plasma diagnostic
  • Plasma measurements
  • plasma monitoring.
  • Plasmas
  • Probes
  • Resonant frequency
  • Temperature measurement
  • 530: Physik
  • ddc:530
Beschreibung:
  • PeerReviewed
Quellsystem:
ReposIt
Interne Metadaten
Quelldatensatz
oai:reposit.haw-hamburg.de:20.500.12738/11800