MICROCHANNEL SENSOR AND METHOD OF MANUFACTURING THE SAME,MIKROKANALSENSOR UND VERFAHREN ZU SEINER HERSTELLUNG

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Autor/in:
Erscheinungsjahr:
2023
Medientyp:
Text
Beschreibung:
  • A microchannel sensor for detecting radiation and/or particles, the microchannel sensor comprising at least one sensor substrate, wherein said sensor substrate comprises a plurality of channels extending from a first side of the substrate to an opposite side of the substrate, wherein said channels are arranged along a channel axis which is tilted relative a normal axis of said substrate, and wherein said plurality of channels comprise a first set of channels with a first cross section and a second set of channels with a second cross section being different from said first cross section.
Lizenz:
  • info:eu-repo/semantics/restrictedAccess
Quellsystem:
Forschungsinformationssystem der UHH

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oai:www.edit.fis.uni-hamburg.de:publications/fd90312e-31f5-4559-aade-124f216fc2a4