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			Droplet epitaxy of GaAs quantum dots on (001), vicinal (001), (110), and (311)A GaAs
		
	
				
			
			
		
                
            
            
                
                    
                        
                            
                                
        
                            
                                
        
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			2009
		
	
			
		
                                
                
 
        
                            
                                
        
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			A1. Atomic force microscopy
		
	
				
 
			
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			A1. Diffusion
		
	
				
 
			
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			A1. Low-dimensional structures
		
	
				
 
			
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			A3. Molecular beam epitaxy
		
	
				
 
			
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			B2. Semiconducting III-V materials
		
	
				
 
			
			
		
                                
                 
        
                            
                                
        
                            
                                
        
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			We study the formation of GaAs quantum dots (QDs) by droplet epitaxy on various GaAs surfaces. The fabrication process consists of two steps. First, liquid Ga droplets are grown in a Volmer-Weber-like mode. This is followed by crystallization under As pressure. We demonstrate fabrication of droplet epitaxial GaAs QDs on (0 0 1), vicinal (0 0 1), (1 1 0), and (3 1 1)A GaAs surfaces. On (3 1 1)A GaAs, QDs are formed with higher density and smaller height compared to (0 0 1) and (1 1 0), which is attributed to a higher energy barrier for surface diffusion. Values of the surface diffusion barrier are determined and its influence on temperature-dependent QD density is studied by means of a QD growth model. On vicinal (0 0 1) surfaces, step bunches are found to act as preferred nucleation sites for GaAs QDs which opens the possibility for a lateral positioning of the QDs by pre-patterning. © 2008 Elsevier B.V. All rights reserved.
		
	
				
 
			
			
		
                                
                 
        
                            
                                
        
                            
                                
        
                            
                                
        
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			info:eu-repo/semantics/closedAccess
		
	
				
 
			
			
		
                                
                 
        
                            
                                
        
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			Forschungsinformationssystem der UHH
		
	
			
		
                                
                
 
        
                            
                        
                    
                    
                    
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