Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon

Link:
Autor/in:
Verlag/Körperschaft:
Hamburg University of Technology
Erscheinungsjahr:
2013
Medientyp:
Text
Schlagworte:
  • A-si:H
  • Amorphous silicon
  • Dielectric waveguides
  • Integrated optics
  • Microdisk
  • Microring
  • Photonics
  • Racetrack
  • WDM
  • 530: Physik
  • 600: Technik
  • 620: Ingenieurwissenschaften
Beschreibung:
  • Low-loss hydrogenated amorphous silicon is employed for the fabrication of various planar integrated travelling wave resonators. Microring, racetrack, and disk resonators of different dimensions were fabricated with CMOS-compatible processes and systematically investigated. The key properties of notch filter ring resonators as extinction ratio, Q-factor, free spectral range, and the group refractive index were determined for resonators of varying radius, thereby achieving critically coupled photonic systems with high extinction ratios of about 20dB for both polarizations. Racetrack resonators that are arranged in add/drop configuration and high quality factor microdisk resonators were optically characterized, with the microdisks exhibiting Q-factors of greater than 100000. Four-channel add/drop wavelength-division multiplexing filters that are based on cascaded racetrack resonators are studied. The design, the fabrication, and the optical characterization are presented. © 2013 SPIE.
Beziehungen:
DOI 10.1117/12.2018509
Quellsystem:
TUHH Open Research
Interne Metadaten
Quelldatensatz
oai:tore.tuhh.de:11420/6587