Local droplet etching-Nanoholes, quantum dots, and air-gap heterostructures

Link:

https://doi.org/10.1063/1.4878285

Autor/in:

Erscheinungsjahr:

2014

Medientyp:

Text

Schlagworte:

air-gap heterostructure
Local droplet etching
quantum dot

Beschreibung:

Local droplet etching (LDE) allows the self-organized generation of nanoholes in semiconductor surfaces and is fully compatible with molecular beam epitaxy (MBE). The influence of the process parameters as well as of droplet and substrate materials on the LDE nanohole morphology is discussed. Furthermore, recent applications of LDE, the fabrication of quantum dots by hole filling and the creation of air-gap heterostructures are addressed. © 2014 AIP Publishing LLC.

Lizenz:

info:eu-repo/semantics/restrictedAccess

Quellsystem:

Forschungsinformationssystem der UHH

Interne Metadaten

Quelldatensatz: oai:www.edit.fis.uni-hamburg.de:publications/d7741882-9f09-4e25-abf8-ffb928972cc1