Miniaturized high-precision piezo driven two axes stepper goniometer

Link:
Autor/in:
Erscheinungsjahr:
2014
Medientyp:
Text
Schlagworte:
  • Piezoelectricity
  • Microscopes
  • Tunneling microscope
  • Piezoelectric Motors
  • Ultrasonic Equipment
  • Piezoelectricity
  • Microscopes
  • Tunneling microscope
  • Piezoelectric Motors
  • Ultrasonic Equipment
Beschreibung:
  • A miniaturized inertial stepper goniometer with two orthogonal axes (θ and φ axes) has been realized using four shear piezo based actuators arranged in a tetrahedral configuration tangent with a polished sapphire spherical rotor. The measured sensitivity is about 11.5 microdegree (μ°) per Volt. The smallest angular step size, achieved with a minimal peak-to-peak voltage Upp of 200 V is about 0.6 millidegree (m°). The crosstalk between both axes is below 10%. Our specific design is used to accurately position a glass fiber, but the concept can be utilized for many different applications as well.
Lizenz:
  • info:eu-repo/semantics/restrictedAccess
Quellsystem:
Forschungsinformationssystem der UHH

Interne Metadaten
Quelldatensatz
oai:www.edit.fis.uni-hamburg.de:publications/8888485d-d249-4465-985f-331588531114