ELECTROSTATIC DEFLECTOR FOR CHARGED PARTICLE OPTICS , ELEKTROSTATISCHER DEFLEKTOR FÜR DIE OPTIK GELADENER TEILCHEN

Electrostatic deflector for charged particle optics comprising at least two deflection electrodes connected to at least one power supply to supply a predefined potential (Ui) to at least one of the deflection electrodes, wherein the deflection electrodes define an axis of flight for a charged particle beam and provide an electrical field in a transverse direction to the axis of flight, wherein a central electrode encloses the axis of flight, wherein the central electrode has a plurality of openings through which the electrical field of the deflection electrodes penetrates into the central electrode and deflects the charged particle beam within the central electrode.