Mechanism and applications of local droplet etching

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Autor/in:
Erscheinungsjahr:
2011
Medientyp:
Text
Schlagworte:
  • Gallium arsenide
  • Nanorings
  • Droplet epitaxy
  • Semiconductor Quantum Dots
  • Semiconductor Quantum Wells
  • Gallium Arsenide
  • Gallium arsenide
  • Nanorings
  • Droplet epitaxy
  • Semiconductor Quantum Dots
  • Semiconductor Quantum Wells
  • Gallium Arsenide
Beschreibung:
  • We give an overview on the fabrication and applications of deep nanoholes in semiconductor surfaces generated by self-assembled drilling with liquid metal droplets as etchant. The method is fully compatible with conventional molecular beam epitaxy equipment. We discuss the mechanism of nanohole formation and two applications: the creation of GaAs quantum rings and of GaAs quantum dots by nanohole filling.
Lizenz:
  • info:eu-repo/semantics/restrictedAccess
Quellsystem:
Forschungsinformationssystem der UHH

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oai:www.edit.fis.uni-hamburg.de:publications/d65c7a59-d728-416c-b0a8-41b70d6995bb