8 Einträge gefunden

1. Test Method for Contactless On-Wafer MEMS Characterization and Production Monitoring

   1. Linz, Sarah
   2. Oesterle, Florian
   3. Lindner, Stefan
   4. Mann, Sebastian
   5. Weigel, Robert
   6. Kölpin, Alexander

   2016 - TUHH Open Research
2. 100 GHz reflectometer for sensitivity analysis of MEMS sensors comprising an intermediate frequency Six-port receiver

   1. Linz, Sarah
   2. Oesterle, Florian
   3. Talai, Armin
   4. Lindner, Stefan
   5. Mann, Sebastian
   6. Barbon, Francesco
   7. Weigel, Robert

   2015 - TUHH Open Research
3. Six-Port technology for precise geometrical measurement applications - An overview

   1. Kölpin, Alexander
   2. Vinci, Gabor
   3. Lindner, Stefan
   4. Mann, Sebastian
   5. Barbon, Francesco
   6. Linz, Sarah
   7. Oesterle, Florian

   2013 - TUHH Open Research
4. A novel, W-band microwave based contactless test method for mechanical sensitivity analysis of MEMS

   1. Oesterle, Florian
   2. Vinci, Gabor
   3. Weigel, Robert
   4. Kölpin, Alexander

   2013 - TUHH Open Research
5. A new approach on MEMS sensor batch testing using an analogue parallel test methodology for massive reduction of test time

   1. Oesterle, Florian
   2. Weigel, Robert
   3. Kölpin, Alexander

   2013 - TUHH Open Research
6. A Large deflection model of silicon membranes for testing intrinsic stress of MEMS microphones by measuring pull-in voltage

   1. Oesterle, Florian
   2. Fink, Franz
   3. Kuhn, Harald
   4. Dehe, Alfons
   5. Weigel, Robert
   6. Kölpin, Alexander

   2013 - TUHH Open Research
7. Ultra-wideband small antenna subarray module with narrow elevation pattern

   1. Gardill, Markus
   2. Schneider, Jurij
   3. Oesterle, Florian
   4. Fischer, Georg
   5. Weigel, Robert
   6. Kölpin, Alexander

   2013 - TUHH Open Research
8. Evaluation of a microwave based contact-free testing method for mechanical sensitivity analysis of MEMS for inline integration of on-wafer measurements

   1. Oesterle, Florian
   2. Gardill, Markus
   3. Weigel, Robert
   4. Kölpin, Alexander

   2013 - TUHH Open Research