Autor/in Kölpin, Alexander Lindner, Stefan 1 Linz, Sarah 1 Mann, Sebastian 1 Oesterle, Florian Weigel, Robert 1 alle zeigenListe einklappen
Test Method for Contactless On-Wafer MEMS Characterization and Production Monitoring Linz, Sarah Oesterle, Florian Lindner, Stefan Mann, Sebastian Weigel, Robert Kölpin, Alexander 2016 - TUHH Open Research
