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1. A Large deflection model of silicon membranes for testing intrinsic stress of MEMS microphones by measuring pull-in voltage

   1. Oesterle, Florian
   2. Fink, Franz
   3. Kuhn, Harald
   4. Dehe, Alfons
   5. Weigel, Robert
   6. Kölpin, Alexander

   2013 - TUHH Open Research