Autor/in Dehe, Alfons 1 Fink, Franz Kuhn, Harald 1 Kölpin, Alexander Oesterle, Florian 1 Weigel, Robert 1 alle zeigenListe einklappen
A Large deflection model of silicon membranes for testing intrinsic stress of MEMS microphones by measuring pull-in voltage Oesterle, Florian Fink, Franz Kuhn, Harald Dehe, Alfons Weigel, Robert Kölpin, Alexander 2013 - TUHH Open Research
