Autor/in Broekaert, José Alfons Clement 1 Nielsch, Kornelius 1 Reinsberg, Klaus-Georg Schumacher, Christian 1 Tempez, Agnès
Depth-profile analysis of thermoelectric layers on Si wafers by pulsed r.f. glow discharge time-of-flight mass spectrometry Reinsberg, Klaus-Georg Schumacher, Christian Tempez, Agnès Nielsch, Kornelius Broekaert, José Alfons Clement 2012 - Forschungsinformationssystem der UHH