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1. Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

   1. Gries, Stella Inge Martha
   2. Brinker, Manuel
   3. Zeller-Plumhoff, Berit
   4. Rings, Dagmar
   5. Krekeler, Tobias
   6. Greving, Imke
   7. Huber, Patrick

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