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1. Wafer-scale fabrication of hierarchically porous silicon and silica by active nanoparticle-assisted chemical etching and pseudomorphic thermal oxidation

   1. Gries, Stella Inge Martha
   2. Brinker, Manuel
   3. Zeller-Plumhoff, Berit
   4. Rings, Dagmar
   5. Krekeler, Tobias
   6. Longo, Elena
   7. Greving, Imke

   2023 - TUHH Open Research - frei zugänglich